"Scaling ferroelectric HZO thickness for low power Ge MFS-FTJ memories."

Nikitas Siannas et al. (2021)

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DOI: 10.1109/ESSDERC53440.2021.9631382

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Nikitas Siannas, Christina Zacharaki, Polychronis Tsipas, Stefanos Chaitoglou, Laura Bégon-Lours, Athanasios Dimoulas:
Scaling ferroelectric HZO thickness for low power Ge MFS-FTJ memories. ESSDERC 2021: 287-290

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