"Manufacturing of 3D integrated sensors and circuits."

Martin Schrems et al. (2014)

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DOI: 10.1109/ESSDERC.2014.6948785

access: closed

type: Conference or Workshop Paper

metadata version: 2019-06-02

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  - https://dblp.org/rec/conf/essderc/SchremsSDKSSS14
Martin Schrems, Joerg Siegert, Peter Dorfi, Jochen Kraft, Ewald Stueckler, Franz Schrank, Siegfried Selberherr:
Manufacturing of 3D integrated sensors and circuits. ESSDERC 2014: 162-165

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