"Porous Si dielectric parameter extraction for use in RF passive device ..."

Panagiotis Sarafis, Emmanouel Hourdakis, Androula G. Nassiopoulou (2013)

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DOI: 10.1109/ESSDERC.2013.6818828

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-19

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Panagiotis Sarafis, Emmanouel Hourdakis, Androula G. Nassiopoulou:
Porous Si dielectric parameter extraction for use in RF passive device integration: Measurements and simulations. ESSDERC 2013: 99-102

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