"Improving Ge-rich GST ePCM reliability through BEOL engineering."

Andrea Redaelli et al. (2021)

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DOI: 10.1109/ESSDERC53440.2021.9631807

access: closed

type: Conference or Workshop Paper

metadata version: 2023-10-09

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Andrea Redaelli, Anna Gandolfo, Giulia Samanni, Enrico Gomiero, Elisa Petroni, Luca Scotti, Andrea Lippiello, Paolo Mattavelli, J. Jasse, D. Codegoni, A. Serafini, Rossella Ranica, Christian Boccaccio, Jury Sandrini, R. Berthelon, J. C. Grenier, Olivier Weber, David Turgis, A. Valery, S. Del Medico, V. Caubet, J. P. Reynard, Didier Dutartre, L. Favennec, Antonino Conte, Fabio Disegni, M. De Tomasi, A. Ventre, Matteo Baldo, Daniele Ielmini, Alfonso Maurelli, P. Ferreira, Franck Arnaud, F. Piazza, Paolo Cappelletti, Roberto Annunziata, R. Gonella:
Improving Ge-rich GST ePCM reliability through BEOL engineering. ESSDERC 2021: 231-234

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