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"Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering ..."
Amita Rawat et al. (2021)
- Amita Rawat
, Krishna K. Bhuwalka
, Philippe Matagne, Bjorn Vermeersch, Hao Wu, Geert Hellings, Julien Ryckaert, Changze Liu:
Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process Risks. ESSDERC 2021: 55-58
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