"Piezoresistive transduction optimization of p-doped poly-Silicon NEMS."

Issam Ouerghi et al. (2015)

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DOI: 10.1109/ESSDERC.2015.7324735

access: closed

type: Conference or Workshop Paper

metadata version: 2024-03-24

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Issam Ouerghi, Willy Ludurczak, Laurent Duraffourg, Carine Ladner, Anouar Idrissi-El Oudrhiri, Patrice Gergaud, Maud Vinet, Thomas Ernst:
Piezoresistive transduction optimization of p-doped poly-Silicon NEMS. ESSDERC 2015: 149-152

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