"CMOS compatible ALD high-k double slot grating couplers for on-chip ..."

Maziar M. Naiini et al. (2012)

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DOI: 10.1109/ESSDERC.2012.6343341

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Maziar M. Naiini, Christoph Henkel, B. Gunnar Malm, Mikael Östling:
CMOS compatible ALD high-k double slot grating couplers for on-chip optical interconnects. ESSDERC 2012: 93-96

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