"The importance of the spacer region to explain short channels mobility ..."

Frederic Monsieur et al. (2014)

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DOI: 10.1109/ESSDERC.2014.6948808

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-29

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Frederic Monsieur, Yvan Denis, Denis Rideau, Vincent Quenette, Gilles Gouget, Clément Tavernier, Hervé Jaouen, Gérard Ghibaudo, Joris Lacord:
The importance of the spacer region to explain short channels mobility collapse in 28nm Bulk and FDSOI technologies. ESSDERC 2014: 254-257

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