"Impact of process variability on a frequency-addressed NEMS array sensor ..."

Olivier Martin et al. (2013)

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DOI: 10.1109/ESSDERC.2013.6818820

access: closed

type: Conference or Workshop Paper

metadata version: 2024-03-24

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Olivier Martin, Éric Colinet, Eric Sage, Cecilia Dupre, Patrick Villard, Sebastien Hentz, Laurent Duraffourg, Thomas Ernst:
Impact of process variability on a frequency-addressed NEMS array sensor used for gravimetric detection. ESSDERC 2013: 65-68

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