"Understanding of slow traps generation in plasma oxidation GeOx/Ge MOS ..."

Mengnan Ke, Mitsuru Takenaka, Shinichi Takagi (2017)

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DOI: 10.1109/ESSDERC.2017.8066650

access: closed

type: Conference or Workshop Paper

metadata version: 2017-10-19

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Mengnan Ke, Mitsuru Takenaka, Shinichi Takagi:
Understanding of slow traps generation in plasma oxidation GeOx/Ge MOS interfaces with ALD high-k layers. ESSDERC 2017: 296-299

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