"New approach for a multi-cantilever arrays sensor system with advanced ..."

Francesco Ivaldi et al. (2016)

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DOI: 10.1109/ESSDERC.2016.7599681

access: closed

type: Conference or Workshop Paper

metadata version: 2023-10-27

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Francesco Ivaldi, Tomasz Bieniek, Pawel Janus, Jerzy Zajac, Piotr Grabiec, Wojciech Majstrzyk, D. Kopiec, Teodor P. Gotszalk:
New approach for a multi-cantilever arrays sensor system with advanced MOEMS readout. ESSDERC 2016: 444-447

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