"Improving off-state capacitance of SOI-CMOS RF switches: how good are air ..."

Daniel Gheysens et al. (2023)

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DOI: 10.1109/ESSDERC59256.2023.10268524

access: closed

type: Conference or Workshop Paper

metadata version: 2023-10-09

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Daniel Gheysens, Alain Fleury, Stéphane Monfray, Frédéric Gianesello, Philippe Cathelin, Jean-François Robillard, David Troadec, Emmanuel Dubois:
Improving off-state capacitance of SOI-CMOS RF switches: how good are air microcavities? ESSDERC 2023: 109-112

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