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"From planar to vertical capacitors: A step towards ferroelectric V-FeFET ..."
Karine Florent et al. (2017)
- Karine Florent, Simone Lavizzari, Luca Di Piazza, Mihaela Ioana Popovici, Goedele Potoms, Tom Raymaekers, Guido Groeseneken
, Jan Van Houdt:
From planar to vertical capacitors: A step towards ferroelectric V-FeFET integration. ESSDERC 2017: 164-167
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