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"High performance NEMS devices for sensing applications."
Thomas Ernst et al. (2015)
- Thomas Ernst
, Sebastien Hentz
, Julien Arcamone
, Vincent Agache
, Laurent Duraffourg
, Issam Ouerghi, Willy Ludurczak, Carine Ladner, Eric Ollier, Philippe Andreucci, Éric Colinet, Pierre Puget:
High performance NEMS devices for sensing applications. ESSDERC 2015: 31-35
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