"Integration of HfO2-based 3D OxRAM with GAA stacked-nanosheet transistor ..."

T. Dubreuil et al. (2023)

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DOI: 10.1109/ESSDERC59256.2023.10268513

access: closed

type: Conference or Workshop Paper

metadata version: 2024-07-08

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T. Dubreuil, Sylvain Barraud, J.-M. Pedini, Jean-Michel Hartmann, F. Boulard, A. Sarrazin, A. Gharbi, Johannes Sturm, A. Lambert, S. Martin, Niccolo Castellani, A. Anotta, A. Magalhaes-Lucas, Aurelie Souhaite, François Andrieu:
Integration of HfO2-based 3D OxRAM with GAA stacked-nanosheet transistor for high-density embedded memory. ESSDERC 2023: 117-120

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