"Design of a poly silicon MEMS microphone for high signal-to-noise ratio."

Alfons Dehe et al. (2013)

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DOI: 10.1109/ESSDERC.2013.6818876

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-19

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Alfons Dehe, Martin Wurzer, Marc Fuldner, Ulrich Krumbein:
Design of a poly silicon MEMS microphone for high signal-to-noise ratio. ESSDERC 2013: 292-295

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