"Advanced TCAD for predictive FinFETs Vth mismatch using full 3D ..."

E. M. Bazizi et al. (2014)

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DOI: 10.1109/ESSDERC.2014.6948830

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-13

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E. M. Bazizi, Alban Zaka, Tom Herrmann, Francis Benistant, J. H. M. Tin, J. P. Goh, L. Jiang, M. Joshi, H. van Meer, K. Korablev:
Advanced TCAD for predictive FinFETs Vth mismatch using full 3D process/device simulation. ESSDERC 2014: 341-344

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