"Monolithic SOI-MEMS capacitive pressure sensor with standard bulk CMOS ..."

Miikka Ylimaula et al. (2003)

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DOI: 10.1109/ESSCIRC.2003.1257209

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Miikka Ylimaula, Markku Åberg, Jyrki Kiihamaki, Hannu Ronkainen:
Monolithic SOI-MEMS capacitive pressure sensor with standard bulk CMOS readout circuit. ESSCIRC 2003: 611-614

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