"Nanoelectromechanical systems: A new opportunity for microelectronics."

Michael L. Roukes (2009)

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DOI: 10.1109/ESSCIRC.2009.5325923

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type: Conference or Workshop Paper

metadata version: 2020-07-07

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Michael L. Roukes:
Nanoelectromechanical systems: A new opportunity for microelectronics. ESSCIRC 2009: 20

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