"Analytic study on micro electromechanical systems sensor."

Ping Zhang, Gunxian Yang, Zhiyong Zhang (2011)

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DOI: 10.1109/EMEIT.2011.6023998

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Ping Zhang, Gunxian Yang, Zhiyong Zhang:
Analytic study on micro electromechanical systems sensor. EMEIT 2011: 4593-4596

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