"Lateral Field Excitation (LFE) of Thickness Shear Mode (TSM) Acoustic ..."

Anthony Dickherber, Christopher D. Corso, William Hunt (2006)

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DOI: 10.1109/IEMBS.2006.259241

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-01

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Anthony Dickherber, Christopher D. Corso, William Hunt:
Lateral Field Excitation (LFE) of Thickness Shear Mode (TSM) Acoustic Waves in Thin Film Bulk Acoustic Resonators (FBAR) as a Potential Biosensor. EMBC 2006: 4590-4593

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