"Development of Predictive Maintenance Technology for Wafer Transfer Robot ..."

Hyeong-Gyun Kim et al. (2019)

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DOI: 10.23919/ELINFOCOM.2019.8706485

access: closed

type: Conference or Workshop Paper

metadata version: 2019-12-05

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Hyeong-Gyun Kim, Hee-Seung Yoon, Ji Hyun Yoo, Hyun-Il Yoon, Seung-Soo Han:
Development of Predictive Maintenance Technology for Wafer Transfer Robot using Clustering Algorithm. ICEIC 2019: 1-4

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