"A Highly accurate method to calculate capacitance of MEMS sensors with ..."

Md. Mosaddequr Rahman, Sazzadur Chowdhury (2009)

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DOI: 10.1109/EIT.2009.5189606

access: closed

type: Conference or Workshop Paper

metadata version: 2025-02-10

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Md. Mosaddequr Rahman, Sazzadur Chowdhury:
A Highly accurate method to calculate capacitance of MEMS sensors with circular membranes. EIT 2009: 178-181

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