"Vapor HF sacrificial etching for phosphorus doped polycrystalline silicon ..."

Haibo Cao, Robert J. Weber (2008)

> Home

Details and statistics

DOI: 10.1109/EIT.2008.4554316

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/eit/CaoW08
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/eit/CaoW08
Haibo Cao, Robert J. Weber:
Vapor HF sacrificial etching for phosphorus doped polycrystalline silicon membrane structures. EIT 2008: 289-293

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.