"Finite element method design and analysis of a MEMS comb drive."

Viorel Ionescu (2015)

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DOI: 10.1109/ECAI.2015.7301233

access: closed

type: Conference or Workshop Paper

metadata version: 2022-04-08

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Viorel Ionescu:
Finite element method design and analysis of a MEMS comb drive. ECAI 2015

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