"MEMS Design Process Based Simulation and Analysis of a Hypothetical Sensor ..."

K. Sathish, C. V. Ravikumar, Chunhua Su (2024)

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DOI: 10.1007/978-981-97-8546-9_13

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-31

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K. Sathish, C. V. Ravikumar, Chunhua Su:
MEMS Design Process Based Simulation and Analysis of a Hypothetical Sensor Design with Electromechanics Interface. DSPP (2) 2024: 221-238

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