"Novel Feature Vectors Considering Distances between Wires for Lithography ..."

Gaku Kataoka et al. (2018)

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DOI: 10.1109/DSD.2018.00028

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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  - https://dblp.org/rec/conf/dsd/KataokaINW18
Gaku Kataoka, Masato Inagi, Shinobu Nagayama, Shin'ichi Wakabayashi:
Novel Feature Vectors Considering Distances between Wires for Lithography Hotspot Detection. DSD 2018: 85-90

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