"3D-stacked Strained SiGe/Ge Gate-All-Around (GAA) Structure Fabricated by ..."

Junkyo Suh et al. (2019)

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DOI: 10.1109/DRC46940.2019.9046465

access: closed

type: Conference or Workshop Paper

metadata version: 2020-04-03

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Junkyo Suh, Andrew C. Meng, Marc Jaikissoon, Michael Braun, Taeho R. Kim, Ann F. Marshall, Anahita Pakzad, Paul C. McIntyre, Krishna C. Saraswat:
3D-stacked Strained SiGe/Ge Gate-All-Around (GAA) Structure Fabricated by 3D Ge Condensation. DRC 2019: 249-250

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