"Optimization of Source/Drain-epi Region Height in GAA Nanosheet FET for RF ..."

Yogendra Machhiwar, Pragya Kushwaha, Harshit Agarwal (2024)

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DOI: 10.1109/DRC61706.2024.10605576

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-16

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Yogendra Machhiwar, Pragya Kushwaha, Harshit Agarwal:
Optimization of Source/Drain-epi Region Height in GAA Nanosheet FET for RF Applications. DRC 2024: 1-2

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