"Hysteresis-free MOSCAP made with Al2O3/(010)β-Ga2O3 interface using a ..."

A. E. Islam et al. (2021)

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DOI: 10.1109/DRC52342.2021.9467169

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-06

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A. E. Islam, Kevin D. Leedy, Neil A. Moser, S. Ganguli, Kyle J. Liddy, Andrew J. Green, Kelson D. Chabak:
Hysteresis-free MOSCAP made with Al2O3/(010)β-Ga2O3 interface using a combination of surface cleaning, etching and post-deposition annealing. DRC 2021: 1-2

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