"Yield projection from defect monitors: the influence of gross defects ..."

Neil Harrison (1995)

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DOI: 10.1109/DFTVS.1995.476947

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Neil Harrison:
Yield projection from defect monitors: the influence of gross defects [BiCMOS process]. DFT 1995: 146-154

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