"Contactless characterization of MEMS devices using optical microscopy."

András Timár, György Bognár (2009)

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DOI: 10.1109/DDECS.2009.5012130

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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András Timár, György Bognár:
Contactless characterization of MEMS devices using optical microscopy. DDECS 2009: 210-213

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