"An electrical test method for MEMS convective accelerometers: Development ..."

Ahmed Amine Rekik et al. (2011)

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DOI: 10.1109/DATE.2011.5763137

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-05

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Ahmed Amine Rekik, Florence Azaïs, Norbert Dumas, Frédérick Mailly, Pascal Nouet:
An electrical test method for MEMS convective accelerometers: Development and evaluation. DATE 2011: 806-811

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