"Layout Design Methodologies for Sub-Wavelength Manufacturing."

Michael L. Rieger, Jeffrey P. Mayhew, Sridhar Panchapakesan (2001)

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DOI: 10.1145/378239.378338

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Michael L. Rieger, Jeffrey P. Mayhew, Sridhar Panchapakesan:
Layout Design Methodologies for Sub-Wavelength Manufacturing. DAC 2001: 85-88

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