"A novel layout decomposition algorithm for triple patterning lithography."

Shao-Yun Fang, Yao-Wen Chang, Wei-Yu Chen (2012)

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DOI: 10.1145/2228360.2228579

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Shao-Yun Fang, Yao-Wen Chang, Wei-Yu Chen:
A novel layout decomposition algorithm for triple patterning lithography. DAC 2012: 1185-1190

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