"Mask assignment and synthesis of DSA-MP hybrid lithography for sub-7nm ..."

Yasmine Badr, Andres Torres, Puneet Gupta (2015)

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DOI: 10.1145/2744769.2744868

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-28

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Yasmine Badr, Andres Torres, Puneet Gupta:
Mask assignment and synthesis of DSA-MP hybrid lithography for sub-7nm contacts/vias. DAC 2015: 70:1-70:6

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