"Use of lithography simulation for the calibration of equation-based design ..."

David Abercrombie, Fedor Pikus, Cosmin Cazan (2009)

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DOI: 10.1145/1629911.1629931

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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David Abercrombie, Fedor Pikus, Cosmin Cazan:
Use of lithography simulation for the calibration of equation-based design rule checks. DAC 2009: 67-70

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