"Modeling of Technological Process in Nanoelectronic Production."

Oleksandr V. Prokhorov et al. (2020)

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DOI: 10.1109/CSIT49958.2020.9321926

access: closed

type: Conference or Workshop Paper

metadata version: 2022-09-29

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Oleksandr V. Prokhorov, Yurii Pronchakov, Oleg Fedorovich, Nataliia Kunanets:
Modeling of Technological Process in Nanoelectronic Production. CSIT (1) 2020: 324-327

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