"MEMS lithography collaborative simulation environment research."

Lianguan Shen et al. (2008)

> Home

Details and statistics

DOI: 10.1109/CSCWD.2008.4537101

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/cscwd/ShenWHZSYWLZ08
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/cscwd/ShenWHZSYWLZ08
Lianguan Shen, Meiyan Wang, Yu Hao, Gaofei Zhao, Zhao Shu, Sun Yuan, Xiaodong Wang, Mujun Li, Jinjin Zheng:
MEMS lithography collaborative simulation environment research. CSCWD 2008: 913-918

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.