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"MEMS lithography collaborative simulation environment research."

Lianguan Shen et al. (2008)

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DOI: 10.1109/CSCWD.2008.4537101

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

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  - conf/cscwd/ShenWHZSYWLZ08
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  - https://dblp.org/rec/conf/cscwd/ShenWHZSYWLZ08
Lianguan Shen, Meiyan Wang, Yu Hao, Gaofei Zhao, Zhao Shu, Sun Yuan, Xiaodong Wang, Mujun Li, Jinjin Zheng:
MEMS lithography collaborative simulation environment research. CSCWD 2008: 913-918

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