"A study on process-compatibility in CMOS-first MEMS-last integration."

Kazuhiro Takahashi et al. (2008)

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DOI: 10.1109/CICC.2008.4672026

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Kazuhiro Takahashi, Makoto Mita, Hiroyuki Fujita, Kazuhiro Suzuki, Hideyuki Funaki, Kazuhiko Itaya, Hiroshi Toshiyoshi:
A study on process-compatibility in CMOS-first MEMS-last integration. CICC 2008: 85-88

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