"Modularized low temperature LNO/PZT/LNO ferroelectric ..."

S. L. Lung et al. (2002)

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DOI: 10.1109/CICC.2002.1012882

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type: Conference or Workshop Paper

metadata version: 2022-10-13

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S. L. Lung, Dennis Lin, S. S. Chen, Gary Weng, C. L. Liu, S. C. Lai, C. W. Tsai, T. B. Wu, Rich Liu:
Modularized low temperature LNO/PZT/LNO ferroelectric capacitor-over-interconnect (COI) FeRAM for advanced SOC (ASOC) application. CICC 2002: 479-482

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