"Micromachined high-Q inductors in 0.18 μm Cu interconnect low-K CMOS."

Hasnain Lakdawala et al. (2001)

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DOI: 10.1109/CICC.2001.929846

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-10

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Hasnain Lakdawala, Xu Zhu, Hao Luo, Suresh Santhanam, L. Rick Carley, Gary K. Fedder:
Micromachined high-Q inductors in 0.18 μm Cu interconnect low-K CMOS. CICC 2001: 579-582

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