"Detection of early-life failures in high-K metal-gate transistors and ..."

Young Moon Kim et al. (2013)

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DOI: 10.1109/CICC.2013.6658544

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-21

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Young Moon Kim, Jun Seomun, Hyung-Ock Kim, Kyung Tae Do, Jung Yun Choi, Kee Sup Kim, Matthias Sauer, Bernd Becker, Subhasish Mitra:
Detection of early-life failures in high-K metal-gate transistors and ultra low-K inter-metal dielectrics. CICC 2013: 1-4

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