"Bipolar pulse width modulation driver for MEMS electrostatic actuator arrays."

Steven L. Garverick et al. (2003)

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DOI: 10.1109/CICC.2003.1249445

access: closed

type: Conference or Workshop Paper

metadata version: 2021-11-15

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Steven L. Garverick, Michael L. Nagy, Michael J. Kane, Jun Guo:
Bipolar pulse width modulation driver for MEMS electrostatic actuator arrays. CICC 2003: 481-484

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