"Remaining Useful Life Estimation of Lenses for an Ion Beam Etching Tool in ..."

Jian Wan, Seán F. McLoone (2023)

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DOI: 10.3233/FAIA231177

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-05

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Jian Wan, Seán F. McLoone:
Remaining Useful Life Estimation of Lenses for an Ion Beam Etching Tool in Semiconductor Manufacturing Using Deep Convolutional Neural Networks. CECNet 2023: 68-74

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