"Predictive Control of Nano-positioning Stage Using ..."

Shengwen Xie, Juan Ren (2019)

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DOI: 10.1109/CDC40024.2019.9029380

access: closed

type: Conference or Workshop Paper

metadata version: 2020-04-27

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Shengwen Xie, Juan Ren:
Predictive Control of Nano-positioning Stage Using Recurrent-neural-network-based Inversion Model. CDC 2019: 7764-7769

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