"Experimentally validated multivariable μ feedback controller design ..."

Marc M. J. van de Wal et al. (2001)

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DOI: 10.1109/.2001.981125

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-06

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Marc M. J. van de Wal, Gregor van Baars, Frank Sperling, Okko H. Bosgra:
Experimentally validated multivariable μ feedback controller design for a high-precision wafer stage. CDC 2001: 1583-1588

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