"An algorithm to convert wafer to calendar-based preventive maintenance ..."

José A. Ramírez-Hernández, Emmanuel Fernández-Gaucherand (2003)

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DOI: 10.1109/CDC.2003.1271954

access: closed

type: Conference or Workshop Paper

metadata version: 2022-03-07

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José A. Ramírez-Hernández, Emmanuel Fernández-Gaucherand:
An algorithm to convert wafer to calendar-based preventive maintenance schedules for semiconductor manufacturing systems. CDC 2003: 5926-5931

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