"Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod ..."

Gert Witvoet et al. (2017)

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DOI: 10.1109/CCTA.2017.8062548

access: closed

type: Conference or Workshop Paper

metadata version: 2021-03-23

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Gert Witvoet, Stefan Kuiper, Geerten Kramer, Max Baeten:
Predictive-model-based MIMO motion control of an unstable 6-DoF hexapod stage for overlay measurements. CCTA 2017: 726-731

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