"Robust interval observer for substrate state estimation of nonlinear ..."

Fabian Schneider, Christian Woelfel (2023)

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DOI: 10.1109/CCTA54093.2023.10252604

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type: Conference or Workshop Paper

metadata version: 2023-09-28

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Fabian Schneider, Christian Woelfel:
Robust interval observer for substrate state estimation of nonlinear reactive sputter processes. CCTA 2023: 194-200

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